Invention Grant
US09190462B2 Semiconductor device and method for low resistive thin film resistor interconnect
有权
用于低电阻薄膜电阻互连的半导体器件和方法
- Patent Title: Semiconductor device and method for low resistive thin film resistor interconnect
- Patent Title (中): 用于低电阻薄膜电阻互连的半导体器件和方法
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Application No.: US14492331Application Date: 2014-09-22
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Publication No.: US09190462B2Publication Date: 2015-11-17
- Inventor: Christoph Andreas Othmar Dirnecker , Leif Christian Olsen
- Applicant: Texas Instruments Deutschland GMBH , Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Frank D. Cimino
- Priority: DE102011100779 20110506
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L49/02 ; H01L23/522 ; H01L27/01 ; H01L21/768

Abstract:
The invention relates to a semiconductor device and a method of manufacturing an electronic device. A first conductive layer (first metal interconnect layer) is deposited. There is an insulating layer (first intermetal dielectric) layer deposited. A resistive layer is deposited on top of the insulating layer and structured in order to serve as a thin film resistor. A second insulating layer (second intermetal dielectric) is then deposited on top of the resistive layer. A first opening is etched into the insulating layers (first and second intermetal dielectric) down to the first conductive layer. A second opening is etched into the insulating layers (first and second intermetal dielectrics) down to the first conductive layer. A cross-sectional plane of the second opening is arranged such that it at least partially overlaps the resistive layer of the thin film resistor in a first direction.
Public/Granted literature
- US20150008560A1 SEMICONDUCTOR DEVICE AND METHOD FOR LOW RESISTIVE THIN FILM RESISTOR INTERCONNECT Public/Granted day:2015-01-08
Information query
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