Invention Grant
US09190462B2 Semiconductor device and method for low resistive thin film resistor interconnect 有权
用于低电阻薄膜电阻互连的半导体器件和方法

Semiconductor device and method for low resistive thin film resistor interconnect
Abstract:
The invention relates to a semiconductor device and a method of manufacturing an electronic device. A first conductive layer (first metal interconnect layer) is deposited. There is an insulating layer (first intermetal dielectric) layer deposited. A resistive layer is deposited on top of the insulating layer and structured in order to serve as a thin film resistor. A second insulating layer (second intermetal dielectric) is then deposited on top of the resistive layer. A first opening is etched into the insulating layers (first and second intermetal dielectric) down to the first conductive layer. A second opening is etched into the insulating layers (first and second intermetal dielectrics) down to the first conductive layer. A cross-sectional plane of the second opening is arranged such that it at least partially overlaps the resistive layer of the thin film resistor in a first direction.
Information query
Patent Agency Ranking
0/0