发明授权
- 专利标题: Pulse light source, and method for stably controlling phase difference between pulse laser lights
- 专利标题(中): 脉冲光源和稳定控制脉冲激光相位差的方法
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申请号: US14413443申请日: 2013-07-19
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公开(公告)号: US09190804B2公开(公告)日: 2015-11-17
- 发明人: Tomoyu Yamashita , Akiyoshi Irisawa
- 申请人: ADVANTEST CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: ADVANTEST CORPORATION
- 当前专利权人: ADVANTEST CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Greenblum & Bernstein P.L.C.
- 优先权: JP2012-174825 20120807
- 国际申请: PCT/JP2013/070265 WO 20130719
- 国际公布: WO2014/024699 WO 20140213
- 主分类号: H01S3/13
- IPC分类号: H01S3/13 ; H01S3/137 ; H01S3/10 ; H01S3/139 ; H01S3/23
摘要:
A pulse light source includes: a master laser that outputs a master laser light pulse whose repetition frequency is controlled to a predetermined value; a slave laser that outputs a slave laser light pulse; a phase comparator that detects a phase difference between an electric signal having a frequency of the predetermined value, and an electric signal based on a light intensity of the slave laser light pulse; a loop filter; an adder that adds a repetition frequency control signal having a certain repetition cycle, to an output from the loop filter; and a phase comparator that measures a pulse phase difference which is a phase difference between the master laser light pulse and the slave laser light pulse. A magnitude of the repetition frequency control signal is controlled such that the measured pulse phase difference matches with a target value of the pulse phase difference.
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