Invention Grant
- Patent Title: Method of fabricating a plurality of metallic microstructures
- Patent Title (中): 制造多个金属微结构的方法
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Application No.: US13266229Application Date: 2010-05-26
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Publication No.: US09194052B2Publication Date: 2015-11-24
- Inventor: Alexandre Fussinger
- Applicant: Alexandre Fussinger
- Applicant Address: CH Le Locle
- Assignee: Nivarox-FAR S.A.
- Current Assignee: Nivarox-FAR S.A.
- Current Assignee Address: CH Le Locle
- Agency: Sughrue Mion, PLLC
- Priority: EP09162638 20090612
- International Application: PCT/EP2010/057255 WO 20100526
- International Announcement: WO2010/142529 WO 20101216
- Main IPC: H01R9/00
- IPC: H01R9/00 ; H05K3/00 ; C25D1/00 ; B81C99/00 ; G03F7/00 ; C25D1/20 ; C25D5/02

Abstract:
A method of fabricating a plurality of metallic microstructures by LIGA process, the method including a flattening step or a levelling step of the resin layer before the step of electroforming the metallic microstructures permitting the resin layer to have a uniform thickness, which enables molds, and then finished metallic microstructures, to be made with uniform dimensional precision in the plane for the metallic microstructures of the same substrate.
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