Invention Grant
US09194052B2 Method of fabricating a plurality of metallic microstructures 有权
制造多个金属微结构的方法

Method of fabricating a plurality of metallic microstructures
Abstract:
A method of fabricating a plurality of metallic microstructures by LIGA process, the method including a flattening step or a levelling step of the resin layer before the step of electroforming the metallic microstructures permitting the resin layer to have a uniform thickness, which enables molds, and then finished metallic microstructures, to be made with uniform dimensional precision in the plane for the metallic microstructures of the same substrate.
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