Invention Grant
US09195147B2 Lithographic apparatus and device manufacturing method involving a seal between a table and a component
有权
平版印刷设备和装置制造方法涉及桌子和部件之间的密封
- Patent Title: Lithographic apparatus and device manufacturing method involving a seal between a table and a component
- Patent Title (中): 平版印刷设备和装置制造方法涉及桌子和部件之间的密封
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Application No.: US12606539Application Date: 2009-10-27
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Publication No.: US09195147B2Publication Date: 2015-11-24
- Inventor: Koen Steffens , Ronald Van Der Ham , Erik Henricus Egidius Catharina Eummelen
- Applicant: Koen Steffens , Ronald Van Der Ham , Erik Henricus Egidius Catharina Eummelen
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20
Abstract:
A seal between a table and a component in a lithographic apparatus is disclosed. The seal bridges a gap between the component and the table when the component is in a position relative to the table. The component is moveable, in use, relative to the table and in an embodiment is attached to the table. The seal may be integral with the component or the table.
Public/Granted literature
- US20100110410A1 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD Public/Granted day:2010-05-06
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