Invention Grant
- Patent Title: Tablet for plasma coating system, method of manufacturing the same, and method of manufacturing a thin film using the method of manufacturing the tablet
- Patent Title (中): 用于等离子体涂覆系统的片剂，其制造方法以及使用制造片剂的方法制造薄膜的方法
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Application No.: US13968352Application Date: 2013-08-15
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Publication No.: US09196464B2Publication Date: 2015-11-24
- Inventor: Hun Kim , Jin-Woo Park
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2013-0048501 20130430
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01J37/34 ; C23C14/08 ; C23C14/30 ; C23C14/32 ; H01L51/56
Abstract:
A tablet for a plasma coating system having a first part that includes a first material having a first sublimation point at a first pressure and a second part that is disposed on the first part and comprises a second material having a second melting point at the first pressure, wherein the second melting point is lower than the first sublimation point.
Public/Granted literature
Information query
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