Invention Grant
- Patent Title: Fin FET and method of fabricating same
- Patent Title (中): 翅片FET及其制造方法
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Application No.: US14695672Application Date: 2015-04-24
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Publication No.: US09196733B2Publication Date: 2015-11-24
- Inventor: Keun-Nam Kim , Hung-Mo Yang , Choong-Ho Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2004-0007426 20040205
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/78 ; H01L29/66 ; H01L29/06

Abstract:
A fin field effect transistor (fin FET) is formed using a bulk silicon substrate and sufficiently guarantees a top channel length formed under a gate, by forming a recess having a predetermined depth in a fin active region and then by forming the gate in an upper part of the recess. A device isolation film is formed to define a non-active region and a fin active region in a predetermined region of the substrate. In a portion of the device isolation film a first recess is formed, and in a portion of the fin active region a second recess having a depth shallower than the first recess is formed. A gate insulation layer is formed within the second recess, and a gate is formed in an upper part of the second recess. A source/drain region is formed in the fin active region of both sides of a gate electrode.
Public/Granted literature
- US20150228796A1 FIN FET AND METHOD OF FABRICATING SAME Public/Granted day:2015-08-13
Information query
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