Invention Grant
US09197217B2 Semiconductor device, measurement device, and correction method 有权
半导体装置,测量装置和校正方法

Semiconductor device, measurement device, and correction method
Abstract:
A semiconductor device includes an oscillator that oscillates at a specific frequency, a semiconductor integrated circuit that integrates a temperature sensor that detects a peripheral temperature, and a controller that is electrically connected to the oscillator and that corrects temperature dependent error in the oscillation frequency of the oscillator based on the temperature detected by the temperature sensor and a sealing member that integrally seals the oscillator and the semiconductor integrated circuit.
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