发明授权
- 专利标题： Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device
- 专利标题（中）： 基板支架保持架装置，基板处理装置以及基板保持架移动方法
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申请号： US13177735申请日： 2011-07-07
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公开(公告)号： US09200362B2公开(公告)日： 2015-12-01
- 发明人: Ryuji Higashisaka , Hiroshi Sone
- 申请人： Ryuji Higashisaka , Hiroshi Sone
- 申请人地址： JP Kawasaki-shi
- 专利权人： Canon Anelva Corporation
- 当前专利权人： Canon Anelva Corporation
- 当前专利权人地址： JP Kawasaki-shi
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2010-156324 20100709
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; C23C14/56 ; C23C14/50
摘要：
A substrate holder stocker device capable of reducing foot print is provided. The device includes: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism for allowing the substrate holder which is held by one of the movable tables A and B stopped at predetermined positions to be held by the other of the movable tables A and B.
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