发明授权
- 专利标题: Semiconductor package with air pressure sensor
- 专利标题(中): 半导体封装带气压传感器
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申请号: US13536210申请日: 2012-06-28
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公开(公告)号: US09200973B2公开(公告)日: 2015-12-01
- 发明人: Kevin L. Lin , Qing Ma , Feras Eid , Johanna Swan , Weng Hong Teh
- 申请人: Kevin L. Lin , Qing Ma , Feras Eid , Johanna Swan , Weng Hong Teh
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: G01L9/16
- IPC分类号: G01L9/16 ; G01L9/00 ; B81B7/00 ; B81C1/00 ; H01L29/84
摘要:
A semiconductor package having an air pressure sensor and methods to form a semiconductor package having an air pressure sensor are described. For example, a semiconductor package includes a plurality of build-up layers. A cavity is disposed in one or more of the build-up layers. An air pressure sensor is disposed in the plurality of build-up layers and includes the cavity and an electrode disposed above the cavity. Also described are various approaches to fabricating a semiconductor package having a hermetically sealed region.
公开/授权文献
- US20140000377A1 SEMICONDUCTOR PACKAGE WITH AIR PRESSURE SENSOR 公开/授权日:2014-01-02
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