发明授权
- 专利标题: Lead frame and a method of manufacturing thereof
- 专利标题(中): 引线框及其制造方法
-
申请号: US14158321申请日: 2014-01-17
-
公开(公告)号: US09202712B2公开(公告)日: 2015-12-01
- 发明人: Dawei Xing , Jie Liu , Hong Wei Guan , Yue Gen Yu , Seow Kiang Khoo
- 申请人: Dawei Xing , Jie Liu , Hong Wei Guan , Yue Gen Yu , Seow Kiang Khoo
- 申请人地址: SG Singapore
- 专利权人: ASM TECHNOLOGY SINGAPORE PTE LTD.
- 当前专利权人: ASM TECHNOLOGY SINGAPORE PTE LTD.
- 当前专利权人地址: SG Singapore
- 代理机构: Ostrolenk Faber LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/48 ; H01L23/495 ; H01L23/498 ; H01L23/00 ; H01L23/31 ; H01L21/56
摘要:
A method of manufacturing a lead frame, comprising the steps of: providing an electrically-conductive base material having first and second planar sides; forming a patterned conductive layer on the first planar side of the base material; etching the second planar side of the base material at portions with respect to exposed portions on the first planar side of the base material comprising the patterned conductive layer, to form partially-etched portions on the second planar side of the base material; providing a non-conductive filling material over the second planar side of the base material, wherein the filling material fills spaces inside the partially-etched portions on the second planar side of the base material to form adjacent portions of the filling material and a plurality of conductive portions on the second planar side of the base material; and etching the exposed portions of the first planar side of the base material comprising the patterned conductive layer to form partially-etched portions on the first planar side of the base material that combine with the partially-etched portions on the second planar side of the base material to thereby form a plurality of separate conductive regions on the first planar side of the base material, each conductive region being electrically conductive with at least a respective one of the plurality of conductive portions on the second planar side of the base material.
公开/授权文献
- US20140203418A1 LEAD FRAME AND A METHOD OF MANUFACTURING THEREOF 公开/授权日:2014-07-24
信息查询
IPC分类: