发明授权
- 专利标题: Method of manufacturing organic light-emitting display apparatus by using an organic layer deposition apparatus having stacked deposition sources
- 专利标题(中): 通过使用具有层叠沉积源的有机层沉积装置制造有机发光显示装置的方法
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申请号: US13487050申请日: 2012-06-01
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公开(公告)号: US09206501B2公开(公告)日: 2015-12-08
- 发明人: Un-Cheol Sung , Mu-Hyun Kim
- 申请人: Un-Cheol Sung , Mu-Hyun Kim
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 代理机构: Christie, Parker & Hale, LLP
- 优先权: KR10-2011-0076990 20110802
- 主分类号: C23C16/448
- IPC分类号: C23C16/448 ; B05D5/06 ; C23C14/04 ; C23C14/12 ; C23C14/24 ; C23C16/455 ; H01L27/12
摘要:
A method of manufacturing an organic light-emitting display apparatus includes: disposing an organic layer deposition apparatus to be apart from a substrate by a set distance; and depositing deposition material on the substrate while the organic layer deposition apparatus or the substrate is moved relative to the other, the deposition source apparatus including: a deposition source including a first deposition source and a second deposition source stacked on the first deposition source; a deposition source nozzle unit including a second deposition source nozzle unit at a side of the second deposition source to face the substrate and including a plurality of second deposition source nozzles, and a first deposition source nozzle unit at the side of the second deposition source to face the substrate and including a plurality of first deposition source nozzles formed to pass through the second deposition source; and a patterning slit sheet smaller than the substrate.
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