发明授权
- 专利标题: Semiconductor device and method for fabricating the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US13447034申请日: 2012-04-13
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公开(公告)号: US09214468B2公开(公告)日: 2015-12-15
- 发明人: Seung Hwan Kim
- 申请人: Seung Hwan Kim
- 申请人地址: KR Incheon
- 专利权人: HYNIX SEMICONDUCTOR INC.
- 当前专利权人: HYNIX SEMICONDUCTOR INC.
- 当前专利权人地址: KR Incheon
- 优先权: KR10-2011-0112418 20111031
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L27/108 ; H01L29/417 ; H01L29/45 ; H01L29/66 ; H01L29/78
摘要:
A semiconductor device and a method for fabricating the same are provided to enable a bit line to be formed easily, increase a bit line process margin and reduce capacitance between the adjacent bit lines. The semiconductor device comprises: a first pillar and a second pillar each extended vertically from a semiconductor substrate and including a vertical channel region; a first bit line located in the lower portion of the vertical channel region inside the first pillar and the second pillar; and an interlayer insulating film located between the first pillar and the second pillar that include the first bit line.
公开/授权文献
- US20130105875A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME 公开/授权日:2013-05-02
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