Invention Grant
US09214553B2 Methods of forming stressed channel regions for a FinFET semiconductor device and the resulting device
有权
形成用于FinFET半导体器件的应力沟道区域的方法和所得到的器件
- Patent Title: Methods of forming stressed channel regions for a FinFET semiconductor device and the resulting device
- Patent Title (中): 形成用于FinFET半导体器件的应力沟道区域的方法和所得到的器件
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Application No.: US14200952Application Date: 2014-03-07
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Publication No.: US09214553B2Publication Date: 2015-12-15
- Inventor: Xiuyu Cai , Ruilong Xie , Ajey P. Jacob , Witold P. Maszara , Kangguo Cheng , Ali Khakifirooz
- Applicant: GLOBALFOUNDRIES Inc. , International Business Machines Corporation
- Applicant Address: KY Grand Cayman US NY Armonk
- Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee Address: KY Grand Cayman US NY Armonk
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/78 ; H01L29/66 ; H01L29/06 ; H01L21/762

Abstract:
One method disclosed includes, among other things, forming an initial fin structure comprised of portions of a substrate, a first epi semiconductor material and a second epi semiconductor material, forming a layer of insulating material so as to over-fill the trenches that define the fin, recessing a layer of insulating material such that a portion, but not all, of the second epi semiconductor portion of the final fin structure is exposed, forming a gate structure around the final fin structure, further recessing the layer of insulating material such that the first epi semiconductor material is exposed, removing the first epi semiconductor material to thereby define an under-fin cavity and substantially filling the under-fin cavity with a stressed material.
Public/Granted literature
- US20150255608A1 METHODS OF FORMING STRESSED CHANNEL REGIONS FOR A FINFET SEMICONDUCTOR DEVICE AND THE RESULTING DEVICE Public/Granted day:2015-09-10
Information query
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