Invention Grant
US09214553B2 Methods of forming stressed channel regions for a FinFET semiconductor device and the resulting device 有权
形成用于FinFET半导体器件的应力沟道区域的方法和所得到的器件

Methods of forming stressed channel regions for a FinFET semiconductor device and the resulting device
Abstract:
One method disclosed includes, among other things, forming an initial fin structure comprised of portions of a substrate, a first epi semiconductor material and a second epi semiconductor material, forming a layer of insulating material so as to over-fill the trenches that define the fin, recessing a layer of insulating material such that a portion, but not all, of the second epi semiconductor portion of the final fin structure is exposed, forming a gate structure around the final fin structure, further recessing the layer of insulating material such that the first epi semiconductor material is exposed, removing the first epi semiconductor material to thereby define an under-fin cavity and substantially filling the under-fin cavity with a stressed material.
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