Invention Grant
US09221241B2 Apparatus and method for removing a CMP pad from a platen 有权
用于从压板移除CMP垫的装置和方法

Apparatus and method for removing a CMP pad from a platen
Abstract:
A method and apparatus for removing a pad adhesively secured to a platen. The apparatus includes a barrel assembly having a clamp assembly fixedly attached to a perimeter of the barrel assembly; a rotatable handle assembly nested within the barrel assembly; and a ratchet assembly nested between the handle assemble and the barrel assembly the ratchet assembly configured to engage the rotatable handle assembly.
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