发明授权
- 专利标题: Damping device for a micromechanical sensor device
- 专利标题(中): 用于微机械传感器装置的阻尼装置
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申请号: US13757082申请日: 2013-02-01
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公开(公告)号: US09222955B2公开(公告)日: 2015-12-29
- 发明人: Holger Hoefer , Ricardo Ehrenpfordt , Klaus Offterdinger , Christian Solf
- 申请人: Holger Hoefer , Ricardo Ehrenpfordt , Klaus Offterdinger , Christian Solf
- 申请人地址: DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102012201486 20120202
- 主分类号: G01P1/00
- IPC分类号: G01P1/00 ; H05K3/00 ; G01P15/08 ; H05K1/14 ; H05K1/02
摘要:
A damping device for a micromechanical sensor device, having at least one first intermediate layer having at least two sections, a second section being situated around a first section, a lateral distance being provided between the first and the second section, and an elastic device being provided between the first section and the second section as an integral part of the first intermediate layer.
公开/授权文献
- US20130199295A1 DAMPING DEVICE FOR A MICROMECHANICAL SENSOR DEVICE 公开/授权日:2013-08-08
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