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US09222955B2 Damping device for a micromechanical sensor device 有权
用于微机械传感器装置的阻尼装置

Damping device for a micromechanical sensor device
摘要:
A damping device for a micromechanical sensor device, having at least one first intermediate layer having at least two sections, a second section being situated around a first section, a lateral distance being provided between the first and the second section, and an elastic device being provided between the first section and the second section as an integral part of the first intermediate layer.
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