Invention Grant
US09223129B2 MEMS device with multi-segment flexures 有权
具有多段弯曲的MEMS器件

MEMS device with multi-segment flexures
Abstract:
A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.
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