Invention Grant
- Patent Title: MEMS device with multi-segment flexures
- Patent Title (中): 具有多段弯曲的MEMS器件
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Application No.: US13866391Application Date: 2013-04-19
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Publication No.: US09223129B2Publication Date: 2015-12-29
- Inventor: Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher
- Applicant: Microvision, Inc.
- Applicant Address: US WA Redmond
- Assignee: Microvision, Inc.
- Current Assignee: Microvision, Inc.
- Current Assignee Address: US WA Redmond
- Agent Kevin D. Wills
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10

Abstract:
A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.
Public/Granted literature
- US20140313557A1 MEMS Device with Multi-Segment Flexures Public/Granted day:2014-10-23
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