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公开(公告)号：US09759909B1
公开(公告)日：2017-09-12
申请号：US15370329
申请日：2016-12-06
Applicant: Microvision, Inc.
Inventor： Jason B. Tauscher , Wyatt O. Davis , Dean R. Brown , David Roy Bowman , Roeland Collet , Mark P. Helsel , Gabriel Castro , Quinn William Haynie
CPC classification number: G02B26/085 , G02B26/0841 , G02B26/10 , G02B26/105 , H01S3/0071
Abstract: Scanning platforms for use in scanning laser devices are described herein. These scanning platforms are particularly applicable to scanning laser devices that use microelectromechanical system (MEMS) structures to facilitate mirror motion. The scanning platforms include a centrally located stationary mount portion and a movable portion that surrounds the stationary portion. The movable portion is configured to be coupled to a mirror and to facilitate motion of that mirror. Such a scanning platform can facilitate reduced size in scanning mirror assembly, and thus can facilitate a more compact scanning laser device.
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Patent Agency Ranking
公开(公告)号：US20140313557A1
公开(公告)日：2014-10-23
申请号：US13866391
申请日：2013-04-19
Applicant: MICROVISION, INC.
Inventor： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher
CPC classification number: G02B26/085 , G02B26/105
Abstract: A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.
Abstract translation: 微机电系统（MEMS）装置包括通过形成枢转轴线的两个挠曲件从固定平台悬挂的扫描平台。 两个弯曲部可以围绕扫描平台的中心线对称或不对称。 至少一个弯曲部包括彼此不平行的两个部分。 第二挠曲可以包括具有一个部分比另一个部分更宽的两个部分。 当MEMS装置作为组件的一部分安装时，挠曲设计减少了安装和热应力的影响。
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公开(公告)号：US09946062B1
公开(公告)日：2018-04-17
申请号：US15370429
申请日：2016-12-06
Applicant: Microvision, Inc.
Inventor： Jason B. Tauscher , Wyatt O. Davis , Dean R. Brown , Mark P. Helsel , Quinn William Haynie , Matthieu Saracco
CPC classification number: G02B26/0833 , B81B3/0072 , B81B2201/042 , B81B2203/0307 , G02B26/105
Abstract: The embodiments described herein provide microelectromechanical system (MEMS) scanners with increased resistance to distortion in the mirror surface. Such MEMS scanners, when incorporated into laser scanning devices, are used to reflect laser light into a pattern of scan lines. Thus, by reducing distortion in the scanning surface these MEMS scanners can provide improved performance in scanning laser devices, including scanning laser projectors and laser depth scanners. In general, this is accomplished by providing a MEMS scanner where the connection to the scan plate is made at an intermediate support structure, and at a point on that intermediate support structure that is offset from the scanning surface. Providing the connection to the scan plate at points offset from the scanning surface can reduce the distortion that occurs in the scanning surface as a result of rotational forces in the MEMS scanner.
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公开(公告)号：US10209510B2
公开(公告)日：2019-02-19
申请号：US15454856
申请日：2017-03-09
Applicant: Microvision, Inc.
Inventor： Matthew Ellis , Jason B. Tauscher
Abstract: The embodiments described herein provide scanners with a modular construction that includes a separately formed scan plate coupled to a microelectromechanical system (MEMS) flexure structure. Such modular scanners, when incorporated into laser scanning devices, reflect laser light into a pattern of scan lines. In general, the modular scanner includes a scan plate that is formed separately from the flexure structure. The scan plate and flexure structure each include coupling features that serve to couple the scan plate to the flexure structure. The flexure structure includes flexure arms that facilitate rotation of the scan plate to reflect laser light into a pattern of scan lines.
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公开(公告)号：US20180259765A1
公开(公告)日：2018-09-13
申请号：US15454856
申请日：2017-03-09
Applicant: Microvision, Inc.
Inventor： Matthew Ellis , Jason B. Tauscher
CPC classification number: G02B26/0833 , B81B3/0083 , B81B2201/042 , B81B2203/058 , G02B26/085 , G02B26/0858 , G02B26/105 , G02B26/106 , H04N9/3129
Abstract: The embodiments described herein provide scanners with a modular construction that includes a separately formed scan plate coupled to a microelectromechanical system (MEMS) flexure structure. Such modular scanners, when incorporated into laser scanning devices, reflect laser light into a pattern of scan lines. In general, the modular scanner includes a scan plate that is formed separately from the flexure structure. The scan plate and flexure structure each include coupling features that serve to couple the scan plate to the flexure structure. The flexure structure includes flexure arms that facilitate rotation of the scan plate to reflect laser light into a pattern of scan lines.
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公开(公告)号：US09223129B2
公开(公告)日：2015-12-29
申请号：US13866391
申请日：2013-04-19
Applicant: Microvision, Inc.
Inventor： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher
CPC classification number: G02B26/085 , G02B26/105
Abstract: A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.
Abstract translation: 微机电系统（MEMS）装置包括通过形成枢转轴线的两个挠曲件从固定平台悬挂的扫描平台。 两个弯曲部可以围绕扫描平台的中心线对称或不对称。 至少一个弯曲部包括彼此不平行的两个部分。 第二挠曲可以包括具有一个部分比另一个部分更宽的两个部分。 当MEMS装置作为组件的一部分安装时，挠曲设计减少了安装和热应力的影响。
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