发明授权
US09228274B2 Axial gradient transport growth process and apparatus utilizing resistive heating
有权
轴向梯度输送生长过程和利用电阻加热的装置
- 专利标题: Axial gradient transport growth process and apparatus utilizing resistive heating
- 专利标题(中): 轴向梯度输送生长过程和利用电阻加热的装置
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申请号: US12632906申请日: 2009-12-08
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公开(公告)号: US09228274B2公开(公告)日: 2016-01-05
- 发明人: Varatharajan Rengarajan , Bryan K. Brouhard , Michael C. Nolan , Ilya Zwieback
- 申请人: Varatharajan Rengarajan , Bryan K. Brouhard , Michael C. Nolan , Ilya Zwieback
- 申请人地址: US PA Saxonburg
- 专利权人: II-VI Incorporated
- 当前专利权人: II-VI Incorporated
- 当前专利权人地址: US PA Saxonburg
- 代理机构: The Webb Law Firm
- 主分类号: C30B23/06
- IPC分类号: C30B23/06 ; C30B29/36
摘要:
A crucible has a first resistance heater is disposed in spaced relation above the top of the crucible and a second resistance heater with a first resistive section disposed in spaced relation beneath the bottom of the crucible and with a second resistive section disposed in spaced relation around the outside of the side of the crucible. The crucible is charged with a seed crystal at the top of an interior of the crucible and a source material in the interior of the crucible in spaced relation between the seed crystal and the bottom of the crucible. Electrical power of a sufficient extent is applied to the first and second resistance heaters to create in the interior of the crucible a temperature gradient of sufficient temperature to cause the source material to sublimate and condense on the seed crystal thereby forming a growing crystal.
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