发明授权
US09228967B2 Micro-hotplate device and sensor comprising such micro-hotplate device
有权
微电镀装置和包含这种微电镀装置的传感器
- 专利标题: Micro-hotplate device and sensor comprising such micro-hotplate device
- 专利标题(中): 微电镀装置和包含这种微电镀装置的传感器
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申请号: US14414068申请日: 2013-07-16
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公开(公告)号: US09228967B2公开(公告)日: 2016-01-05
- 发明人: Christine Alepee , Nicolas Moser
- 申请人: SGX SENSORTECH SA
- 申请人地址: CH Corcelles
- 专利权人: SGX SENSORTECH SA
- 当前专利权人: SGX SENSORTECH SA
- 当前专利权人地址: CH Corcelles
- 代理机构: Koppel, Patrick, Heybl & Philpott
- 优先权: WOPCT/EP2012/063931 20120716
- 国际申请: PCT/EP2013/065037 WO 20130716
- 国际公布: WO2014/012948 WO 20140123
- 主分类号: G01N15/06
- IPC分类号: G01N15/06 ; G01N33/00 ; G01N33/48 ; G01N27/12 ; G01N27/18
摘要:
The present invention relates to a micro-hotplate device comprising a frame, a membrane, an active area comprising at least one active layer, and a heating structure designed to heat said active layer, said heating structure having concentric tracks and comprising inner tracks (20) and inner spaces (22) and outer tracks (24) and outer spaces (26) as being the one or two tracks and spaces located the furthest away from the center of the heating structure, characterized in that said outer tracks (24) are designed to be located closer to their neighboring tracks and/or are designed to have a width which is lower than those of the inner tracks (20), the width and the spacing of said inner tracks (20) being substantially constant.
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