Micro-hotplate device and sensor comprising such micro-hotplate device
    1.
    发明授权
    Micro-hotplate device and sensor comprising such micro-hotplate device 有权
    微电镀装置和包含这种微电镀装置的传感器

    公开(公告)号:US09228967B2

    公开(公告)日:2016-01-05

    申请号:US14414068

    申请日:2013-07-16

    申请人: SGX SENSORTECH SA

    摘要: The present invention relates to a micro-hotplate device comprising a frame, a membrane, an active area comprising at least one active layer, and a heating structure designed to heat said active layer, said heating structure having concentric tracks and comprising inner tracks (20) and inner spaces (22) and outer tracks (24) and outer spaces (26) as being the one or two tracks and spaces located the furthest away from the center of the heating structure, characterized in that said outer tracks (24) are designed to be located closer to their neighboring tracks and/or are designed to have a width which is lower than those of the inner tracks (20), the width and the spacing of said inner tracks (20) being substantially constant.

    摘要翻译: 本发明涉及一种包括框架,膜,包括至少一个有源层的有源区和设计用于加热所述有源层的加热结构的微电加热装置,所述加热结构具有同心轨道并且包括内轨道(20 )和内部空间(22)和外部轨道(24)和外部空间(26),其是位于距离加热结构的中心最远的一个或两个轨道和间隔,其特征在于,所述外轨道(24) 被设计成更靠近它们相邻的轨道定位和/或被设计成具有比内轨道(20)的宽度低的宽度,所述内轨道(20)的宽度和间距基本上是恒定的。

    MICRO-HOTPLATE DEVICE AND SENSOR COMPRISING SUCH MICRO-HOTPLATE DEVICE
    2.
    发明申请
    MICRO-HOTPLATE DEVICE AND SENSOR COMPRISING SUCH MICRO-HOTPLATE DEVICE 有权
    包含这种微孔装置的微孔装置和传感器

    公开(公告)号:US20150212030A1

    公开(公告)日:2015-07-30

    申请号:US14414068

    申请日:2013-07-07

    申请人: SGX SENSORTECH SA

    IPC分类号: G01N27/12

    摘要: The present invention relates to a micro-hotplate device comprising a frame, a membrane, an active area comprising at least one active layer, and a heating structure designed to heat said active layer, said heating structure having concentric tracks and comprising inner tracks (20) and inner spaces (22) and outer tracks (24) and outer spaces (26) as being the one or two tracks and spaces located the furthest away from the center of the heating structure, characterized in that said outer tracks (24) are designed to be located closer to their neighboring tracks and/or are designed to have a width which is lower than those of the inner tracks (20), the width and the spacing of said inner tracks (20) being substantially constant.

    摘要翻译: 本发明涉及一种包括框架,膜,包括至少一个有源层的有源区和设计用于加热所述有源层的加热结构的微电加热装置,所述加热结构具有同心轨道并且包括内轨道(20 )和内部空间(22)和外部轨道(24)和外部空间(26),其是位于距离加热结构的中心最远的一个或两个轨道和间隔,其特征在于,所述外轨道(24) 被设计成更靠近它们相邻的轨道定位和/或被设计成具有比内轨道(20)的宽度低的宽度,所述内轨道(20)的宽度和间距基本上是恒定的。