发明授权
- 专利标题： Waveguide and integrated circuit
- 专利标题（中）： 波导和集成电路
-
申请号： US13729922申请日： 2012-12-28
-
公开(公告)号： US09229161B2公开(公告)日： 2016-01-05
- 发明人: Kenji Todori , Yoshiaki Fukuzumi , Hideaki Aochi , Tsukasa Tada , Ko Yamada , Shigehiko Mori , Naomi Shida , Reiko Yoshimura
- 申请人： Kenji Todori , Yoshiaki Fukuzumi , Hideaki Aochi , Tsukasa Tada , Ko Yamada , Shigehiko Mori , Naomi Shida , Reiko Yoshimura
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JP2012-069073 20120326
- 主分类号： G02B6/12
- IPC分类号： G02B6/12 ; G02B6/26 ; G02B6/10 ; B82Y20/00 ; G02B6/122 ; G02B6/125
摘要：
According to one embodiment, a waveguide includes: a substrate and a member. The member covers at least a part of the substrate and has a difference in the refractive index from the substrate not less than 2. A plurality of concave parts are provided on the substrate. The concave parts are arrayed on an upper face of the substrate. At least a part of a side face of each of the concave parts includes an arc. An inner diameter of each of the concave parts is not more than 50 nm. Intervals of the neighboring concave parts are not more than the inner diameter. The member fills the concave part.
公开/授权文献
- US20130251306A1 WAVEGUIDE AND INTEGRATED CIRCUIT 公开/授权日：2013-09-26
信息查询
