发明授权
US09231020B2 Device and method of gettering on silicon on insulator (SOI) substrate
有权
绝缘体(SOI)衬底上的吸杂元件和方法
- 专利标题: Device and method of gettering on silicon on insulator (SOI) substrate
- 专利标题(中): 绝缘体(SOI)衬底上的吸杂元件和方法
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申请号: US14156620申请日: 2014-01-16
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公开(公告)号: US09231020B2公开(公告)日: 2016-01-05
- 发明人: Dmitry Veinger , Assaf Lahav , Omer Katz , Ruthie Shima-Edelstein
- 申请人: Dmitry Veinger , Assaf Lahav , Omer Katz , Ruthie Shima-Edelstein
- 申请人地址: IL Migdal Haemek
- 专利权人: TOWER SEMICONDUCTOR LTD.
- 当前专利权人: TOWER SEMICONDUCTOR LTD.
- 当前专利权人地址: IL Migdal Haemek
- 代理机构: Shichrur & Co.
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L27/148
摘要:
Some demonstrative embodiments include devices and/or methods of gettering on silicon on insulator (SOI) substrate. For example, a complementary metal-oxide-semiconductor (CMOS) integrated circuit (IC) may include a plurality of pixels arranged on a wafer, a pixel of the pixels including: a silicon active area; at least one non-silicided leakage-sensitive component formed on the active area, the leakage-sensitive component is sensitive to metal contaminants; a non-leakage-sensitive area formed on the active area, the non-leakage-sensitive area surrounding the leakage-sensitive component; and at least one silicided gettering region formed on the non-leakage-sensitive area to trap the metal contaminants.
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