Invention Grant
US09233487B2 Method for manufacturing photoaligning integrated large area metallic stamp, and method for manufacturing polymer optical device using same
有权
用于制造光电整合的大面积金属印模的方法,以及使用其制造聚合物光学器件的方法
- Patent Title: Method for manufacturing photoaligning integrated large area metallic stamp, and method for manufacturing polymer optical device using same
- Patent Title (中): 用于制造光电整合的大面积金属印模的方法,以及使用其制造聚合物光学器件的方法
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Application No.: US13980188Application Date: 2011-02-22
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Publication No.: US09233487B2Publication Date: 2016-01-12
- Inventor: Myung Yung Jeong , Seung Hun Oh , Jin Hwa Ryu , Sang Uk Cho , Tae Ho Lee
- Applicant: Myung Yung Jeong , Seung Hun Oh , Jin Hwa Ryu , Sang Uk Cho , Tae Ho Lee
- Applicant Address: KR Pusan
- Assignee: Pusan National University Industry-University Cooperation Foundation
- Current Assignee: Pusan National University Industry-University Cooperation Foundation
- Current Assignee Address: KR Pusan
- Agency: Paratus Law Group, PLLC
- Priority: KR10-2011-0004672 20110117
- International Application: PCT/KR2011/001151 WO 20110222
- International Announcement: WO2012/099294 WO 20120726
- Main IPC: B29C33/38
- IPC: B29C33/38 ; B29D11/00 ; G03F7/00 ; G02B6/10 ; C25D1/00 ; C25D1/10 ; B82Y10/00 ; B82Y40/00

Abstract:
The disclosure relates to a method for manufacturing a photoaligning integrated large area metallic stamp, which includes the following steps: making a unit device PLC mold pattern, and molding a unit PLC device pattern through a multistep imprinting method using the PLC mold pattern; heat treating the unit PLC device pattern to minimize scattering loss due to surface roughness; making a groove pattern for supporting an optical fiber; making an integrated PDMS mold for a unit device by aligning the unit PLC device pattern and the groove pattern; and repeatedly replicating the integrated PDMS mold for a unit device to make a large area PDMS pattern, and making a large area stamp through electroforming using the large area PDMS pattern.
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