Invention Grant
US09233487B2 Method for manufacturing photoaligning integrated large area metallic stamp, and method for manufacturing polymer optical device using same 有权
用于制造光电整合的大面积金属印模的方法,以及使用其制造聚合物光学器件的方法

Method for manufacturing photoaligning integrated large area metallic stamp, and method for manufacturing polymer optical device using same
Abstract:
The disclosure relates to a method for manufacturing a photoaligning integrated large area metallic stamp, which includes the following steps: making a unit device PLC mold pattern, and molding a unit PLC device pattern through a multistep imprinting method using the PLC mold pattern; heat treating the unit PLC device pattern to minimize scattering loss due to surface roughness; making a groove pattern for supporting an optical fiber; making an integrated PDMS mold for a unit device by aligning the unit PLC device pattern and the groove pattern; and repeatedly replicating the integrated PDMS mold for a unit device to make a large area PDMS pattern, and making a large area stamp through electroforming using the large area PDMS pattern.
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