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Invention Grant
US09234702B2 Prebake equipment and air discharge method thereof 有权
预烘设备及其排气方法

Prebake equipment and air discharge method thereof
Abstract:
A prebake equipment for drying a substrate (105) and an air discharge method, the prebake equipment comprising: a bottom plate (105), a periphery frame (101) and an upper cover plate, the bottom plate (105) and the upper cover plate being spaced from each other, the periphery frame (101) being provided between the bottom plate (105) and the upper cover plate such that the bottom plate (105), the periphery frame (101) and the upper cover plate define a cavity, wherein discharge holes are provided at the periphery frame (101) and a filler (104) for filtering moisture and dust in the air stream is provided between the bottom plate (105) and the periphery frame (101).
Abstract(Chinese):

一种用于干燥基材（105）的预烘设备和排气方法，所述预烘烤设备包括：底板（105），周边框架（101）和上盖板，所述底板（105）和所述上盖 平板彼此间隔开，所述周边框架（101）设置在所述底板（105）和所述上盖板之间，使得所述底板（105），所述周边框架（101）和所述上盖板限定空腔 其特征在于，在所述周缘框架（101）设置有排出孔，在所述底板（105）与所述周边框架（101）之间设置有用于过滤空气流中的水分和灰尘的填料（104）。

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