Invention Grant
- Patent Title: Semiconductor structure and fabricating method thereof
- Patent Title (中): 半导体结构及其制造方法
-
Application No.: US14262582Application Date: 2014-04-25
-
Publication No.: US09236326B2Publication Date: 2016-01-12
- Inventor: Alexander Kalnitsky , Hsiao-Chin Tuan , Shih-Fen Huang , Hsin-Li Cheng , Felix Ying-Kit Tsui
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L23/48 ; H01L21/768 ; H01L21/265 ; H01L21/22

Abstract:
A semiconductor structure and a method for fabricating the same are provided. The semiconductor structure includes a wafer substrate having a top surface and a bottom surface, and a conductive pillar in the wafer substrate defined by a deep trench insulator through the top surface and the bottom surface of the wafer substrate. The method for fabricating the semiconductor structure includes following steps. A deep trench is formed from a top surface of a wafer substrate to define a conductive region in the wafer substrate. The conductive region is doped with a dopant. The deep trench is filled with an insulation material to form a deep trench insulator. And the wafer substrate is thinned from a bottom surface of the wafer substrate to expose the deep trench insulator and isolate the conductive region to form a conductive pillar.
Public/Granted literature
- US20150311140A1 SEMICONDUCTOR STRUCTURE AND FABRICATING METHOD THEREOF Public/Granted day:2015-10-29
Information query
IPC分类: