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US09236444B2 Methods of fabricating quantum well field effect transistors having multiple delta doped layers 有权
制造具有多个δ掺杂层的量子阱场效应晶体管的方法

Methods of fabricating quantum well field effect transistors having multiple delta doped layers
Abstract:
Methods of fabricating quantum well field effect transistors are provided. The methods may include forming a first barrier layer including a first delta doped layer on a quantum well layer and forming a second barrier layer including a second delta doped layer selectively on a portion of the first barrier layer in a first region of the substrate. The methods may also include patterning the first and second barrier layers and the quantum well layer to form a first quantum well channel structure in the first region and patterning the first barrier layer and the quantum well layer to form a second quantum well channel structure in a second region. The methods may further include forming a gate insulating layer on the first and second quantum well channel structures of the substrate and forming a gate electrode layer on the gate insulating layer.
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