Invention Grant
US09236444B2 Methods of fabricating quantum well field effect transistors having multiple delta doped layers
有权
制造具有多个δ掺杂层的量子阱场效应晶体管的方法
- Patent Title: Methods of fabricating quantum well field effect transistors having multiple delta doped layers
- Patent Title (中): 制造具有多个δ掺杂层的量子阱场效应晶体管的方法
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Application No.: US13947239Application Date: 2013-07-22
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Publication No.: US09236444B2Publication Date: 2016-01-12
- Inventor: Mark S. Rodder , Robert C. Bowen
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78

Abstract:
Methods of fabricating quantum well field effect transistors are provided. The methods may include forming a first barrier layer including a first delta doped layer on a quantum well layer and forming a second barrier layer including a second delta doped layer selectively on a portion of the first barrier layer in a first region of the substrate. The methods may also include patterning the first and second barrier layers and the quantum well layer to form a first quantum well channel structure in the first region and patterning the first barrier layer and the quantum well layer to form a second quantum well channel structure in a second region. The methods may further include forming a gate insulating layer on the first and second quantum well channel structures of the substrate and forming a gate electrode layer on the gate insulating layer.
Public/Granted literature
- US20140329374A1 METHODS OF FABRICATING QUANTUM WELL FIELD EFFECT TRANSISTORS HAVING MULTIPLE DELTA DOPED LAYERS Public/Granted day:2014-11-06
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