发明授权
- 专利标题: Techniques and configuration for stacking transistors of an integrated circuit device
- 专利标题(中): 用于堆叠集成电路器件的晶体管的技术和配置
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申请号: US13997972申请日: 2011-12-28
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公开(公告)号: US09236476B2公开(公告)日: 2016-01-12
- 发明人: Ravi Pillarisetty , Charles C. Kuo , Han Wui Then , Gilbert Dewey , Willy Rachmady , Van H. Le , Marko Radosavljevic , Jack T. Kavalieros , Niloy Mukherjee
- 申请人: Ravi Pillarisetty , Charles C. Kuo , Han Wui Then , Gilbert Dewey , Willy Rachmady , Van H. Le , Marko Radosavljevic , Jack T. Kavalieros , Niloy Mukherjee
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 国际申请: PCT/US2011/067663 WO 20111228
- 国际公布: WO2013/101003 WO 20130704
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/786 ; H01L21/84 ; H01L29/423 ; H01L27/12 ; G11C11/412 ; H01L29/66 ; H01L27/06
摘要:
Embodiments of the present disclosure provide techniques and configurations for stacking transistors of a memory device. In one embodiment, an apparatus includes a semiconductor substrate, a plurality of fin structures formed on the semiconductor substrate, wherein an individual fin structure of the plurality of fin structures includes a first isolation layer disposed on the semiconductor substrate, a first channel layer disposed on the first isolation layer, a second isolation layer disposed on the first channel layer, and a second channel layer disposed on the second isolation layer, and a gate terminal capacitively coupled with the first channel layer to control flow of electrical current through the first channel layer for a first transistor and capacitively coupled with the second channel layer to control flow of electrical current through the second channel layer for a second transistor. Other embodiments may be described and/or claimed.
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