Invention Grant
US09236495B2 Oxide thin film transistor, method for fabricating TFT, display device having TFT, and method for fabricating the same
有权
氧化物薄膜晶体管,TFT制造方法,具有TFT的显示装置及其制造方法
- Patent Title: Oxide thin film transistor, method for fabricating TFT, display device having TFT, and method for fabricating the same
- Patent Title (中): 氧化物薄膜晶体管,TFT制造方法,具有TFT的显示装置及其制造方法
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Application No.: US13729539Application Date: 2012-12-28
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Publication No.: US09236495B2Publication Date: 2016-01-12
- Inventor: HyunSik Seo , MoonGoo Kim , BongChul Kim , JeongHoon Lee , Changll Ryoo
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Fenwick & West LLP
- Priority: KR10-2012-0055658 20120524
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H01L29/423

Abstract:
There are provided an oxide TFT, a method for fabricating a TFT, an array substrate for a display device having a TFT, and a method for fabricating the display device. The oxide thin film transistor includes: a gate electrode formed on a substrate; a gate insulating layer formed on the entire surface of the substrate including the gate electrode; an active layer pattern formed on the gate insulating layer above the gate electrode and completely overlapping the gate electrode; an etch stop layer pattern formed on the active layer pattern and the gate insulating layer; and a source electrode and a drain electrode formed on the gate insulating layer including the etch stop layer pattern and the active layer pattern and spaced apart from one another, and overlapping both sides of the etch stop layer pattern and the underlying active layer pattern.
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