Invention Grant
- Patent Title: Humidity detection sensor and a method for manufacturing the same
- Patent Title (中): 湿度检测传感器及其制造方法
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Application No.: US13851795Application Date: 2013-03-27
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Publication No.: US09239308B2Publication Date: 2016-01-19
- Inventor: Atsushi Tondokoro , Satoshi Waga , Takashi Sato , Shinya Yokoyama , Sumihito Morita
- Applicant: ALPS ELECTRIC CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: ALPS ELECTRIC CO., LTD.
- Current Assignee: ALPS ELECTRIC CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Beyer Law Group LLP
- Priority: JP2010-224660 20101004
- Main IPC: G01R27/26
- IPC: G01R27/26 ; G01N27/22 ; G01N1/00 ; H01L21/00

Abstract:
A humidity detection sensor includes a lower electrode provided on a board, an upper electrode provided so as to face the lower electrode, a humidity sensing film which is formed at least between the lower electrode and the upper electrode and whose dielectric constant changes in response to humidity, and a protective film provided so as to cover the upper electrode. Each of the upper electrode and the protective film has an opening through which the humidity sensing film is partially exposed to the outside. In the opening, the humidity sensing film is provided so as to reach at least a position higher than the position of the lower surface of the protective film.
Public/Granted literature
- US20130207673A1 HUMIDITY DETECTION SENSOR AND A METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-08-15
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