Magnetic sensor
    1.
    发明授权

    公开(公告)号:US09939498B2

    公开(公告)日:2018-04-10

    申请号:US15093905

    申请日:2016-04-08

    CPC classification number: G01R33/09 G01N27/902 G01N27/9033

    Abstract: A magnetic sensor includes a substrate, magnetoresistive effect elements arranged on a surface of the substrate, a first wiring line arranged on a surface of the substrate, an insulation layer configured to cover the magnetoresistive effect elements and the first wiring line, a soft magnetic body arranged on the insulation layer, and a second wiring line arranged on the insulation layer, wherein the magnetoresistive effect elements each extend in a first direction and are arranged while being separated from each other in a second direction orthogonal to the first direction in a case of viewing in plan the substrate, the soft magnetic body includes a first direction extension portion that extends in the first direction, and when viewed in plan, the first direction extension portion is arranged between the magnetoresistive effect elements, and the second wiring line is connected to the first wiring line.

    Humidity detection sensor and a method for manufacturing the same
    2.
    发明授权
    Humidity detection sensor and a method for manufacturing the same 有权
    湿度检测传感器及其制造方法

    公开(公告)号:US09239308B2

    公开(公告)日:2016-01-19

    申请号:US13851795

    申请日:2013-03-27

    CPC classification number: G01N27/223 G01N1/00 G01N2201/00 H01L21/00 Y10T29/49

    Abstract: A humidity detection sensor includes a lower electrode provided on a board, an upper electrode provided so as to face the lower electrode, a humidity sensing film which is formed at least between the lower electrode and the upper electrode and whose dielectric constant changes in response to humidity, and a protective film provided so as to cover the upper electrode. Each of the upper electrode and the protective film has an opening through which the humidity sensing film is partially exposed to the outside. In the opening, the humidity sensing film is provided so as to reach at least a position higher than the position of the lower surface of the protective film.

    Abstract translation: 湿度检测传感器包括设置在板上的下电极,设置成面向下电极的上电极,至少形成在下电极和上电极之间并且其介电常数响应于 湿度和设置成覆盖上电极的保护膜。 上部电极和保护膜中的每一个具有开口,湿度感测膜通过该开口部分地暴露于外部。 在开口中,湿度感测膜被设置成至少达到比保护膜的下表面的位置更高的位置。

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