发明授权
- 专利标题： Method of determining an asymmetric property of a structure
- 专利标题（中）： 确定结构的不对称性质的方法
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申请号： US12900863申请日： 2010-10-08
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公开(公告)号： US09239522B2公开(公告)日： 2016-01-19
- 发明人: Meng-Fu Shih , In-Kyo Kim , Xiafang Zhang , Leonid Poslavsky
- 申请人： Meng-Fu Shih , In-Kyo Kim , Xiafang Zhang , Leonid Poslavsky
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： Blakely Sokoloff Taylor & Zafman LLP
- 主分类号： G01J3/36
- IPC分类号： G01J3/36 ; G01B11/30 ; G01N21/00 ; G03F7/20 ; G01N21/47 ; G01N21/956 ; G01N21/21 ; G01N21/95
摘要：
Methods of determining asymmetric properties of structures are described. A method includes measuring, for a grating structure, a first signal and a second, different, signal obtained by optical scatterometry. A difference between the first signal and the second signal is then determined. An asymmetric structural parameter of the grating structure is determined based on a calculation using the first signal, the second signal, and the difference.
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