Invention Grant
- Patent Title: Spectroscope and microspectroscopic system
- Patent Title (中): 光谱仪和显微光谱系统
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Application No.: US14448334Application Date: 2014-07-31
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Publication No.: US09243955B2Publication Date: 2016-01-26
- Inventor: Ryoichi Sataka , Hisao Osawa
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2012-022619 20120206
- Main IPC: G01J3/30
- IPC: G01J3/30 ; G01J3/44 ; G01N21/64 ; G02B21/00 ; G01J3/02 ; G01J3/12

Abstract:
A spectroscope used for a microspectroscopic system includes: a collimating optical system that causes signal light to be substantially collimated light; spectroscopic optical systems and each of which includes at least one of each of spectral elements and in which a wavelength band for spectral separation varies depending on an incident angle of the signal light; at least one of each of optical receivers that detect the signal light spectrally separated by the spectroscopic optical systems; a mechanism that varies the incident angles of the signal light on the spectral elements; and a controller unit that determines the incident angles of the signal light on the spectral elements in accordance with the wavelength band for spectrally separating the signal light and controls the mechanism so as to attain the incident angles.
Public/Granted literature
- US20140340677A1 SPECTROSCOPE AND MICROSPECTROSCOPIC SYSTEM Public/Granted day:2014-11-20
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