Invention Grant
US09245311B2 Display apparatus actuators including anchored and suspended shutter electrodes 有权
显示装置致动器包括固定和悬挂快门电极

Display apparatus actuators including anchored and suspended shutter electrodes
Abstract:
This disclosure provides systems, methods and apparatus for actuating an electromechanical systems (EMS)-based light modulator. An actuator for an EMS-based light modulator can be formed from the combination of a drive electrode, an anchored shutter electrode, and a suspended shutter electrode. A parallel plate portion of the drive electrode along with the suspended shutter electrode form a parallel plate portion of the actuator. A zipper portion of the drive electrode and the anchored shutter electrode form a zipper portion of the actuator.
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