Invention Grant
- Patent Title: Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method
- Patent Title (中): 有机层沉积装置，使用其的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置
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Application No.: US13787464Application Date: 2013-03-06
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Publication No.: US09246135B2Publication Date: 2016-01-26
- Inventor: Su-Hwan Lee , Un-Cheol Sung
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2012-0075141 20120710
- Main IPC: H01L51/56
- IPC: H01L51/56 ; C23C14/04 ; C23C14/12 ; C23C14/54 ; H01L51/50 ; H01L51/00
Abstract:
An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method, and in particular, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate and enables high-definition patterning, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method.
Public/Granted literature
Information query
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