Invention Grant
US09246297B2 Gas laser oscillator controlling adjusted level of laser power supply 有权
气体激光振荡器控制激光电源的调整水平

Gas laser oscillator controlling adjusted level of laser power supply
Abstract:
A gas laser oscillator including discharge tubes, main discharge electrodes, auxiliary electrodes, an output mirror which outputs a laser, and a mechanical shutter which cuts off the laser output from the output mirror. To maintain the auxiliary discharge in the state where the laser output is zero, the base discharge command is set to a first command value when the mechanical shutter is closed, and is set to a second command value smaller than the first command value when the mechanical shutter is opened.
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