Invention Grant
- Patent Title: Apparatus for transferring substrate
- Patent Title (中): 用于转移衬底的装置
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Application No.: US14505712Application Date: 2014-10-03
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Publication No.: US09246377B2Publication Date: 2016-01-26
- Inventor: Takayuki Fukasawa , Yeon-Keon Moon , Sang-woo Sohn , Katsushi Kishimoto , Sang-Won Shin
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2013-0167333 20131230
- Main IPC: B65G35/00
- IPC: B65G35/00 ; H02K41/03 ; H01L21/677 ; H02K7/09

Abstract:
Disclosed is an apparatus for transferring substrates capable of stably transferring substrates by using magnetic levitation. The apparatus includes a substrate stage including a substrate loading unit, a first guide block disposed at a first end of the substrate stage and including a first magnet generator, a second guide block disposed at a second end of the substrate stage and including a second magnet generator, a first guide rail accommodating the first magnet generator and including a third magnet generator, and a second guide rail accommodating the second magnet generator and including a fourth magnet generator. The first magnet generator and the third magnet generator exert repulsive force on each other, and the second magnet generator and the fourth magnet generator exert repulsive force on each other.
Public/Granted literature
- US20150188399A1 APPARATUS FOR TRANSFERRING SUBSTRATE Public/Granted day:2015-07-02
Information query
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