Invention Grant
- Patent Title: Bonding pad on a back side illuminated image sensor
- Patent Title (中): 背面照明图像传感器的接合垫
-
Application No.: US13763355Application Date: 2013-02-08
-
Publication No.: US09252180B2Publication Date: 2016-02-02
- Inventor: Volume Chien , I-Chih Chen , Ying-Lang Wang , Hsin-Chi Chen , Ying-Hao Chen , Hung-Ta Huang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/146 ; H01L23/00 ; H04N5/335

Abstract:
A bonding pad structure for an image sensor device and a method of fabrication thereof. The image sensor device has a radiation-sensor region including a substrate and a radiation detection device, and a bonding pad region including the bonding pad structure. The bonding pad structure includes: an interconnect layer; an interlayer dielectric layer (IDL), both layers extending from under the substrate into the bonding pad region; an isolation layer formed on IDL; a conductive pad having a planar portion and one or more bridging portions extending perpendicularly from the planar portion, through the IDL and isolation layers, and to the interconnect layer; and a plurality of non-conducting stress-releasing structures disposed between the isolation layer and the conductive pad in such a way to adjoin its planar and the bridging portions together for releasing potential pulling stress applied thereon and preventing a conductive pad peeling.
Public/Granted literature
- US20140225215A1 BONDING PAD ON A BACK SIDE ILLUMINATED IMAGE SENSOR Public/Granted day:2014-08-14
Information query
IPC分类: