发明授权
- 专利标题: MOSFET and method for manufacturing the same
- 专利标题(中): MOSFET及其制造方法
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申请号: US13510461申请日: 2011-11-18
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公开(公告)号: US09252280B2公开(公告)日: 2016-02-02
- 发明人: Huilong Zhu , Miao Xu , Qingqing Liang
- 申请人: Huilong Zhu , Miao Xu , Qingqing Liang
- 申请人地址: CN
- 专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人地址: CN
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 优先权: CN201110274852 20110916
- 国际申请: PCT/CN2011/082424 WO 20111118
- 国际公布: WO2013/037167 WO 20130321
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L29/786 ; H01L29/66
摘要:
The present disclosure discloses a metal-oxide-semiconductor field-effect transistor (MOSFET) and a method for manufacturing the same. The MOSFET includes: a silicon on insulator (SOI) wafer which comprises a semiconductor substrate, a buried insulating layer, and a semiconductor layer, the buried insulating layer being on the semiconductor substrate, and the semiconductor layer being on the buried insulating layer; a gate stack on the semiconductor layer; a source region and a drain region, which are in the semiconductor layer and on opposite sides of the gate stack; and a channel region, which is in the semiconductor layer and sandwiched by the source region and the drain region, wherein the MOSFET further comprises a back gate, the back gate being located in the semiconductor substrate and having a first doped region in a lower portion of the back gate and a second doped region in an upper portion of the back gate.
公开/授权文献
- US20130099315A1 MOSFET AND METHOD FOR MANUFACTURING THE SAME 公开/授权日:2013-04-25
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