Invention Grant
US09252707B2 MEMS mass bias to track changes in bias conditions and reduce effects of flicker noise
有权
MEMS质量偏移以跟踪偏置条件的变化并减少闪烁噪声的影响
- Patent Title: MEMS mass bias to track changes in bias conditions and reduce effects of flicker noise
- Patent Title (中): MEMS质量偏移以跟踪偏置条件的变化并减少闪烁噪声的影响
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Application No.: US13721642Application Date: 2012-12-20
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Publication No.: US09252707B2Publication Date: 2016-02-02
- Inventor: Manu Seth , Aaron Caffee
- Applicant: Silicon Laboratories Inc.
- Applicant Address: US TX Austin
- Assignee: Silicon Laboratories Inc.
- Current Assignee: Silicon Laboratories Inc.
- Current Assignee Address: US TX Austin
- Agency: Abel Law Group, LLP
- Main IPC: H03B5/36
- IPC: H03B5/36
Abstract:
A technique for tracking changes in bias conditions of a microelectromechanical system (MEMS) device includes applying an electrode bias signal to an electrode of the MEMS device. The technique includes applying a mass bias signal to a mass of the MEMS device suspended from a substrate of the MEMS device. The technique includes generating the mass bias signal based on a target mass-to-electrode bias signal level and a signal level of the electrode bias signal.
Public/Granted literature
- US20140176251A1 MEMS MASS BIAS TO TRACK CHANGES IN BIAS CONDITIONS AND REDUCE EFFECTS OF FLICKER NOISE Public/Granted day:2014-06-26
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