Invention Grant
US09254997B2 CMOS-MEMS integrated flow for making a pressure sensitive transducer 有权
用于制造压敏传感器的CMOS-MEMS集成流

CMOS-MEMS integrated flow for making a pressure sensitive transducer
Abstract:
A sensor is made up of two substrates which are adhered together. A first substrate includes a pressure-sensitive micro-electrical-mechanical (MEMS) structure and a conductive contact structure that protrudes outwardly beyond a first face of the first substrate. A second substrate includes a complementary metal oxide semiconductor (CMOS) device and a receiving structure made up of sidewalls that meet a conductive surface which is recessed from a first face of the second substrate. A conductive bonding material physically adheres the conductive contact structure to the conductive surface and electrically couples the MEMS structure to the CMOS device.
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