Invention Grant
US09257260B2 Method and system for adaptively scanning a sample during electron beam inspection 有权
电子束检测过程中自适应扫描样品的方法和系统

Method and system for adaptively scanning a sample during electron beam inspection
Abstract:
A system for adaptive electron beam scanning may include an inspection sub-system configured to scan an electron beam across the surface of a sample. The inspection sub-system may include an electron beam source, a sample stage, a set of electron-optic elements, a detector assembly and a controller communicatively coupled to one or more portions of the inspection sub-system. The controller may assess one or more characteristics of one or more portions of an area of the sample for inspection and, responsive to the assessed one or more characteristics, adjust one or more scan parameters of the inspection sub-system.
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