Invention Grant
US09257348B2 Methods of forming replacement gate structures for transistors and the resulting devices
有权
为晶体管和所产生的器件形成替代栅极结构的方法
- Patent Title: Methods of forming replacement gate structures for transistors and the resulting devices
- Patent Title (中): 为晶体管和所产生的器件形成替代栅极结构的方法
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Application No.: US13959847Application Date: 2013-08-06
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Publication No.: US09257348B2Publication Date: 2016-02-09
- Inventor: Ruilong Xie , Kisik Choi , Su Chen Fan , Shom Ponoth
- Applicant: GLOBALFOUNDRIES Inc. , International Business Machines Corporation
- Applicant Address: KY Grand Cayman US NY Armonk
- Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee Address: KY Grand Cayman US NY Armonk
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/66 ; H01L21/28 ; H01L27/092 ; H01L29/40 ; H01L29/49

Abstract:
Disclosed herein are illustrative methods and devices that involve forming spacers with internally trimmed internal surfaces to increase the width of the upper portions of a gate cavity. In some embodiments, the internal surface of the spacer has a stepped cross-sectional configuration or a tapered cross-sectional configuration. In one example, a device is disclosed wherein the P-type work function metal for a PMOS device is positioned only within the lateral space defined by the untrimmed internal surfaces of the spacers, while the work function adjusting metal for the NMOS device is positioned laterally between the lateral spaces defined by both the trimmed and untrimmed internal surfaces of the sidewall spacers.
Public/Granted literature
- US20150041905A1 METHODS OF FORMING REPLACEMENT GATE STRUCTURES FOR TRANSISTORS AND THE RESULTING DEVICES Public/Granted day:2015-02-12
Information query
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