Invention Grant
US09259761B2 Heat treatment system, heat treatment method, and non-transitory computer-readable recording medium
有权
热处理系统,热处理方法和非暂时计算机可读记录介质
- Patent Title: Heat treatment system, heat treatment method, and non-transitory computer-readable recording medium
- Patent Title (中): 热处理系统,热处理方法和非暂时计算机可读记录介质
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Application No.: US13852235Application Date: 2013-03-28
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Publication No.: US09259761B2Publication Date: 2016-02-16
- Inventor: Yuichi Takenaga , Wenling Wang
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2012-077869 20120329
- Main IPC: G06F19/00
- IPC: G06F19/00 ; B05D3/02 ; B05C9/14 ; H01L21/324

Abstract:
According to an embodiment of the present invention, a heat treatment system is provided. The heat treatment system includes a heating unit, a heat treatment condition memory unit, a power change model memory unit, a heat treatment change model memory unit, a heat treatment result reception unit, and an optimal temperature calculation unit. In the heat treatment system, the optimal temperature calculation unit calculates the power of the heating unit at a corresponding temperature based on the model stored in the power change model memory unit and the calculated temperature, and an optimal temperature is a temperature at which a heat treatment result is closest to the targeted heat treatment result within a range in which the calculated power of the heating unit is not saturated.
Public/Granted literature
- US20130260039A1 HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM Public/Granted day:2013-10-03
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