发明授权
US09260291B2 Suspended getter material-based structure 有权
悬浮吸气剂材料结构

Suspended getter material-based structure
摘要:
Getter structure comprising a substrate and at least one getter material-based layer mechanically connected to the substrate by means of at least one support, in which the surface of the support in contact with the substrate is smaller than the surface of a first face of the getter material layer, in which said first face is in contact with the support, and a second face of the getter material layer, opposite said first face is at least partially exposed.
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