发明授权
- 专利标题: Suspended getter material-based structure
- 专利标题(中): 悬浮吸气剂材料结构
-
申请号: US12494147申请日: 2009-06-29
-
公开(公告)号: US09260291B2公开(公告)日: 2016-02-16
- 发明人: Stephane Caplet , Xavier Baillin
- 申请人: Stephane Caplet , Xavier Baillin
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人地址: FR Paris
- 代理机构: Nixon Peabody LLP
- 代理商 Robert E. Krebs
- 优先权: FR0854451 20080701
- 主分类号: B32B3/24
- IPC分类号: B32B3/24 ; H01L23/00 ; B81B7/00 ; H01L23/26
摘要:
Getter structure comprising a substrate and at least one getter material-based layer mechanically connected to the substrate by means of at least one support, in which the surface of the support in contact with the substrate is smaller than the surface of a first face of the getter material layer, in which said first face is in contact with the support, and a second face of the getter material layer, opposite said first face is at least partially exposed.
公开/授权文献
- US20100001361A1 SUSPENDED GETTER MATERIAL-BASED STRUCTURE 公开/授权日:2010-01-07
信息查询