发明授权
- 专利标题: Acceleration sensor
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申请号: US13511178申请日: 2010-11-23
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公开(公告)号: US09261530B2公开(公告)日: 2016-02-16
- 发明人: Hitoshi Yosida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatosi Nomura , Katumi Kakimoto , Yuji Suzuki
- 申请人: Hitoshi Yosida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatosi Nomura , Katumi Kakimoto , Yuji Suzuki
- 申请人地址: JP Osaka
- 专利权人: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- 当前专利权人: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- 当前专利权人地址: JP Osaka
- 代理机构: Bacon & Thomas, PLLC
- 优先权: JP2009-266581 20091124; JP2009-266582 20091124; JP2009-266583 20091124; JP2009-266585 20091124
- 国际申请: PCT/IB2010/002975 WO 20101123
- 国际公布: WO2011/064642 WO 20110603
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01P15/08 ; G01P15/18
摘要:
An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
公开/授权文献
- US20120227494A1 ACCELERATION SENSOR 公开/授权日:2012-09-13
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