发明授权
- 专利标题: Current threshold response mode for arc management
- 专利标题(中): 电弧管理的当前阈值响应模式
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申请号: US13104762申请日: 2011-05-10
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公开(公告)号: US09263241B2公开(公告)日: 2016-02-16
- 发明人: Skip B. Larson , Kenneth E. Nauman
- 申请人: Skip B. Larson , Kenneth E. Nauman
- 申请人地址: US CO Fort Collins
- 专利权人: Advanced Energy Industries, Inc.
- 当前专利权人: Advanced Energy Industries, Inc.
- 当前专利权人地址: US CO Fort Collins
- 代理机构: Neugeboren O'Dowd PC
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; H01J37/32
摘要:
This disclosure describes systems, methods, and apparatuses for extinguishing electrical arcs in a plasma processing chamber. Once an arc is detected, the steady state voltage provided to the plasma processing chamber can be reduced, and the current being provided to the chamber decays below a steady state value as the arc is extinguished. When the current falls to or below a current threshold, the voltage can be ramped back up bringing the voltage and current back to steady state values. This technique enables power to return to a steady state level faster than traditional arc mitigation techniques.
公开/授权文献
- US20120285620A1 Current Threshold Response Mode for Arc Management 公开/授权日:2012-11-15
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