Invention Grant
- Patent Title: Singulation apparatus comprising an imaging device
- Patent Title (中): 分割装置包括成像装置
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Application No.: US14146875Application Date: 2014-01-03
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Publication No.: US09263352B2Publication Date: 2016-02-16
- Inventor: Chi Wah Cheng , Hoi Shuen Tang , Chun Kit Liu
- Applicant: Chi Wah Cheng , Hoi Shuen Tang , Chun Kit Liu
- Applicant Address: SG Singapore
- Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B26D5/20 ; H01L21/66 ; H01L21/67 ; H01L21/78 ; B26D5/00 ; B26D5/06 ; B26D1/18 ; H01L21/68

Abstract:
Disclosed is a singulation apparatus for cutting a workpiece. The singulation apparatus comprises: i) a processor; ii) at least one chuck device for securing the workpiece to be cut; iii) a cutting device spaced from the at least one chuck device by a separation distance, the cutting device being for cutting the workpiece secured to the at least one chuck device; and iv) an imaging device operable to capture one or more images comprising the cutting device and a reference feature. In particular, the processor is configured to determine a separation distance between the cutting device and the reference feature based on the one or more images as captured by the imaging device, to thereby determine the separation distance between the cutting device and the workpiece as secured to the at least one chuck device.
Public/Granted literature
- US20150194354A1 SINGULATION APPARATUS COMPRISING AN IMAGING DEVICE Public/Granted day:2015-07-09
Information query
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