Invention Grant
US09263437B2 Mechanisms for forming metal-insulator-metal (MIM) capacitor structure
有权
用于形成金属 - 绝缘体 - 金属(MIM)电容器结构的机制
- Patent Title: Mechanisms for forming metal-insulator-metal (MIM) capacitor structure
- Patent Title (中): 用于形成金属 - 绝缘体 - 金属(MIM)电容器结构的机制
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Application No.: US14133037Application Date: 2013-12-18
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Publication No.: US09263437B2Publication Date: 2016-02-16
- Inventor: Chieh-Shuo Liang , Hsing-Chih Lin , Yu-Lung Yeh , Chih-Ho Tai , Ching-Hung Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
- Current Assignee Address: TW Hsin-Chu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/06 ; H01L23/522 ; H01L49/02 ; H01L23/532

Abstract:
Embodiments of mechanisms for forming a metal-insulator-metal (MIM) capacitor structure are provided. The metal-insulator-metal capacitor structure includes a substrate. The MIM capacitor structure also includes a CBM layer formed on the substrate, and the CBM layer includes a bottom barrier layer, a main metal layer and a top barrier layer. The MIM capacitor structure further includes a first high-k dielectric layer formed on the CBM layer, an insulating layer formed on the first high-k dielectric layer and a second high-k dielectric layer formed on the insulating layer. The MIM capacitor structure also includes a CTM layer formed on the second high-k dielectric layer, and the CBM layer includes a bottom barrier layer, a main metal layer and a top barrier layer.
Public/Granted literature
- US20150171207A1 MECHANISMS FOR FORMING METAL-INSULATOR-METAL (MIM) CAPACITOR STRUCTURE Public/Granted day:2015-06-18
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