Invention Grant
US09263470B1 Semiconductor device, manufacturing method thereof, and display apparatus 有权
半导体装置及其制造方法以及显示装置

Semiconductor device, manufacturing method thereof, and display apparatus
Abstract:
Provided is a semiconductor device including a buffer layer that is on a substrate and includes an inclined surface; a crystalline silicon layer that is on the buffer layer; a gate electrode that is on the crystalline silicon layer while being insulated from the crystalline silicon layer; and a source electrode and a drain electrode that are each electrically connected to the crystalline silicon layer, the angle between the substrate and the inclined surface being in a range of about 17.5 degrees to less than about 70 degrees.
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