Invention Grant
- Patent Title: Method for producing strained Ge fin structures
- Patent Title (中): 生产应变Ge鳍结构的方法
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Application No.: US14047950Application Date: 2013-10-07
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Publication No.: US09263528B2Publication Date: 2016-02-16
- Inventor: Benjamin Vincent
- Applicant: IMEC
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP12187332 20121005
- Main IPC: H01L21/479
- IPC: H01L21/479 ; H01L29/161 ; H01L29/66

Abstract:
Disclosed are methods for forming fins. In an example embodiment, a method includes providing a substrate that includes at least two elongated structures separated by an isolation region. Each elongated structure comprises a semiconductor alloy of a first semiconductor material and a second semiconductor material, and a relaxed portion of the elongated structure includes the semiconductor alloy in a relaxed and substantially defect-free condition. The method further includes subjecting the substrate to a condensation-oxidation, such that each elongated structure forms a fin and an oxide layer. The fin includes a fin base portion formed of the semiconductor alloy and a fin top portion of the first semiconductor material in a strained condition. The fin top portion is formed by condensation of the first semiconductor material. The oxide layer includes an oxide of the second semiconductor material. The method further includes removing at least some of the oxide layer.
Public/Granted literature
- US20140099774A1 Method for Producing Strained Ge Fin Structures Public/Granted day:2014-04-10
Information query
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